Fundamentals of Microfabrication and Nanotechnology, Third Edition, Three-Volume Set (3 Book Series)
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| Title | : | Fundamentals of Microfabrication and Nanotechnology, Third Edition, Three-Volume Set (3 Book Series) |
| Author | : | |
| Rating | : | 4.84 (368 Votes) |
| Asin | : | B017IO2J8G |
| Format Type | : | - |
| Number of Pages | : | 0 Pages |
| Publish Date | : | 0000-00-00 |
| Genre | : |
From Book 1:Providing a clear theoretical understanding of MEMS and NEMS, Solid-State Physics, Fluidics, and Analytical Techniques in Micro- and Nanotechnology focuses on nanotechnology and the science behind it, including solid-state physics. It provides a clear understanding of the electronic, mechanical, and optical properties of solids relied on in integrated circuits (ICs), MEMS, and NEMS. After exploring the rise of Si, MEMS, and NEMS in a historical context, the text discusses crystallography, quantum mechanics, the band theory of solids, and the silicon single crystal. It concludes with coverage of photonics, the quantum hall effect, and superconductivity. Fully illustrated in color, the text offers end-of-chapter problems, worked examples, extensive references, and a comprehensive glossary of terms.Topics include:
- Crystallography and the crystalline materials used in many semiconductor devices
- Quantum mechanics, the band theory of solids,
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